PFEIFFER
PFEIFFER
PDF
Specifications
Pumping Speed for N2 | l/sec (60Hz) | 67 |
Ultimated Pressure | Torr | 7.5 x 10-8 |
Backing Pump |
| MVP 015-4 |
Turbo Pump |
| Hipace 80 |
Connection | In | DN 63 ISO-K |
Connection | Out | Air Cooled |
Power | 110 - 240 VAC, 50/60 Hz | |
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