ENFICO

XDC/M1

Thin Film Thickness Monitor

Specifications

 

 Crystal Range & Precision

 6.0 to 5.0 MHz

 Thickness Accuracy

 0.5 %

 Inputs

 4 Defined TTL/CMOS Compatible or Closure to GND

 Outputs

 4 Single Pole Closing Contacts (Relays), 2.5A @120V

 Thickness Resolution

 1Å

 Rate Resolution

 0.1Å for 1 to 99.9 Å/s / 1Å for 100 to 999 Å/s

 Film Parameter

 9 Materials

 Hardware Interface

 RS232

 Sensors

 1